Optimization of Device Geometry of a Fully Implantable MEMS Hearing Aid Microphone by Genetic Algorithm

نویسندگان

  • Apoorva Dwivedi
  • Gargi Khanna
چکیده

The paper presents the performance optimization of a MEMS accelerometer based microphone for the fully implantable hearing application. A genetic algorithm is employed to optimize the device geometry parameters satisfying the design constraints. The analytical model run on MATLAB and the simulation model implemented in COMSOL MULTIPHYSICS 4.2 show good agreement. Optimization with Genetic algorithm shows enhanced capacitance of 3.14 pF, displacement sensitivity of 2.49 nm/g and capacitive sensitivity of 2.48 fF/g.

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تاریخ انتشار 2016